发明名称 Semiconductor device and manufacturing method thereof
摘要 A semiconductor device comprises a semiconductor substrate having a main surface, a first semiconductor region of a first conductive type, formed on the main surface of the semiconductor substrate, a surrounding of the first semiconductor region is buried with a first insulation film, a second semiconductor region of a second conductive type, formed on the first insulation film and the first semiconductor region, a second insulation film, formed on the second semiconductor region, an end portion of the second insulation film is positioned above the first insulation film, and having an opening at a central portion thereof to be positioned above the first semiconductor region, and a third semiconductor region of a first conductivity type formed on a surface of the second semiconductor region exposed through the opening of the second insulation film.
申请公布号 US5604374(A) 申请公布日期 1997.02.18
申请号 US19950399659 申请日期 1995.03.07
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 INOU, KAZUMI;KATSUMATA, YASUHIRO
分类号 H01L29/73;H01L21/20;H01L21/331;H01L29/732;(IPC1-7):H01L27/082;H01L29/70 主分类号 H01L29/73
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