| 摘要 |
PROBLEM TO BE SOLVED: To obtain a vacuum lamination device which is applied as a device for manufacturing a solar cell module with a high productivity. SOLUTION: A cylindrical pipe 102 is in annular body and a plurality of deaeration holes are formed on the wall of the inner-periphery side of the annular body. The annular body is installed above a sheet-shaped base 101 and is fixed. A lid member covers the annular body, thus constituting a space part. A buffer material 111 is installed along the inside of the cylindrical pipe 102 for constituting the space part. When evacuating the space part for lamination treatment, the lid member is sucked to the annular body and the base 101 but a sharp angle configuration of the lid member can be slowed due to the inclusion of the buffer material 111. By preventing the occurrence of a bent part at an extremely sharp angle of the lid member, the occurrence of a crack can be suppressed, evacuation can be positively made, and productivity can be improved. |
