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发明名称
SEMICONDUCTOR ELEMENT, MANUFACTURE THEREOF AND MANUFACTURE OF CONTACT HOLE
摘要
申请公布号
JPH0951094(A)
申请公布日期
1997.02.18
申请号
JP19950199493
申请日期
1995.08.04
申请人
SONY CORP
发明人
IWABUCHI MAKOTO
分类号
H01L21/28;H01L21/316;H01L21/318;H01L21/336;H01L29/78;(IPC1-7):H01L29/78
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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