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发明名称
SEKUNDÄRIONENMASSENSPEKTROMETER ZUR ANALYSE POSITIV UND NEGATIV GELADENER IONEN
摘要
申请公布号
AT148263(T)
申请公布日期
1997.02.15
申请号
AT19930103506T
申请日期
1993.03.04
申请人
EBARA CORPORATION
发明人
KANEKO, KAZUHIKO;HAYASHI, HIDEAKI;NAGAI, KAZUTOSHI
分类号
G01N23/225;H01J49/02;H01J49/26;(IPC1-7):H01J49/02
主分类号
G01N23/225
代理机构
代理人
主权项
地址
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