| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain a device which can reduce foreign substances blowing into the circumstance by each specific chuck main body, vacuum suction system and air releasing system being provided. SOLUTION: Inhaling ports 2b inhaling air 1 and opening ports 2c opening the air 1 are provided through a wafer mount face 2a and a chuck main part 2 which has an inhaling-side passage 2d connected with the inhaling ports 2b and has an opening-side passage 2e connected with the opening ports 2c, is provided. Also a vacuum suction system 5 having a first valve member 3 which is connected with the inhaling-side passage 2d and allows and closes the flow of the air 1 and having an air inhaling means 4 which inhaling the air 1, is provided. Additionally an air opening system 8 having a second valve member 6 which is connected with the opening-side passage 2e, and allows and closes the flow of the air 1 and having an air opening means 7 which releases the air 1, is provided. Also the flow of the air 1 at the inhaling-side passage 2d or at the opening-side passage 2e is made to be the same direction.</p> |
