| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a wafer stage device for a semiconductor manufacturing device by which manufacturing cost is reduced and work for setting requirements of process is easy. SOLUTION: A wafer stage device supporting wafers within a reaction tube of a single wafer processing semiconductor manufacturing device comprises a supporting post 18 standing on a wafer stage base 17, a wafer mount plate 12 being supported by the post and wafers 11 being supported via the wafer mount plate, therefore the supporting position of the wafer mount plate refering to the post can be changed, work for setting requirement of process can be easy and additionally the construction can be simple.</p> |
