摘要 |
PROBLEM TO BE SOLVED: To provide material most suitable for working environment by forming a closing mechanism capable of being displaced by operation means, of two metal pieces connected firmly to each other. SOLUTION: A valve seat 1 is arranged between an inlet 10 and an outlet 12, and a closing mechanism 18 is arranged corresponding to the valve seat. The mechanism 18 is firmly connected to a diaphragm 6. The diaphragm 6 is firmly connected to a layer 3. A first metal piece 9 of the closing mechanism 18 is connected to the layer 3 through a circular surface 19 and a plate-shaped connection layer 4 is adhered to the exposed circular surface of a first metal piece 9 of the closing mechanism 18. To the connection layer 4 a circular plate- shaped preload layer 5 is adhered and then a second metal piece 8 is arranged thereon. Accordingly a micro valve can be manufactured from the material most suitable for the working environment. |