| 摘要 |
PROBLEM TO BE SOLVED: To obtain a piezoelectric actuator which can operate over a wide voltage range with high response by bonding a plate member and a piezoelectric ceramic through an alloy layer containing at least gallium. SOLUTION: The piezoelectric actuator comprises piezoelectric ceramics 2 arranged on a plate member 1 while being boded through an alloy layer 3 containing at least gallium. The plate member 1 is composed, at least the bonding surface 1a side thereof, of a conductive material so that a voltage can be applied to the piezoelectric ceramics 2 laminated with an electrode 4. When a voltage is fed between the electrode 4 arranged on the piezoelectric ceramics 2 and the conductive material of plate member 1, the piezoelectric ceramics 2 is displaced. Similarly, the plate member 1 is displaced to cause displacement of the entire piezoelectric actuator corresponding to the supplied voltage. Since the displacement of piezoelectric ceramics 2 is not absorbed easily at the bonded part, high response is ensured and the piezoelectric actuator can be operated over a wide voltage range. |
