发明名称 SEMICONDUCTOR MEMORY DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor memory device which can reduce the memory size and also can dissolve electric unbalance. SOLUTION: The gate electrodes 3a and 3b of driver transistors Q3 and Q4 and load transistors Q5 and Q6 and the word line 9a doubling as the gate electrode of access transistors Q1 and Q2 are constituted of the separate layers of the first polysilicon layer and the second polysilicon layer (the second polyside layer), respectively. Moreover, at the cell current paths 11 and 12, contact parts other than the bit line contact and GND contact are not made.
申请公布号 JPH0945796(A) 申请公布日期 1997.02.14
申请号 JP19950194899 申请日期 1995.07.31
申请人 MITSUBISHI ELECTRIC CORP 发明人 KURIYAMA SACHITADA
分类号 H01L21/8244;H01L27/11 主分类号 H01L21/8244
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