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发明名称
INSPECTING DEVICE OF PHOTODETECTOR
摘要
申请公布号
JPH0945744(A)
申请公布日期
1997.02.14
申请号
JP19950193552
申请日期
1995.07.28
申请人
NEC CORP
发明人
KAWARATANI MASAHIKO
分类号
G02F1/13;H01L21/66;H01L31/04;(IPC1-7):H01L21/66
主分类号
G02F1/13
代理机构
代理人
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