| 摘要 |
PROBLEM TO BE SOLVED: To provide a magnetic recording medium suitable for high-density recording by using an inexpensive material by forming magnetic columns in such a manner that the center part of the magnetic column essentially consists of Fe-N while the peripheral part of the column consists of Fe-N-O. SOLUTION: For example, a PET film 1 of 6μm thickness is stretched over a supply roll 2a and a winding roll 2b and travelled along a cooling can roll 3 at 0.5m/min velocity. After the vacuum chamber 8 is evacuated to 10<-4> to 10<-6> Torr, for example, about 8.8×10<-6> Torr vacuum degree, electron beams are emitted from an electron gun 7 to heat, melt and vaporize a magnetic metal Fe in a crucible 5 to form a Fe-based metal magnetic film to 1000-10000Åthickness, for example, 2400Åthickness on the PET film 1. During forming the Fe-base metal magnetic film, nitrogen gas is supplied from a nitrogen gas supply nozzle 9 by 10sccm and a mixture gas of nitrogen and oxygen is supplied to the ion gun by 20sccm so as to irradiate the Fe-metal magnetic film with nitrogen ion and oxygen ion.
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