DEFECT DISTRIBUTION SIMULATION METHOD,申请号JP19950192754-传众专利搜索

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发明名称	DEFECT DISTRIBUTION SIMULATION METHOD
摘要
申请公布号	JPH0945630(A)	申请公布日期	1997.02.14
申请号	JP19950192754	申请日期	1995.07.28
申请人	NEC CORP	发明人	SAWAHATA KOICHI
分类号	H01L21/22;G06F17/50;H01L21/00;H01L21/265;(IPC1-7):H01L21/265	主分类号	H01L21/22
代理机构		代理人
主权项
地址

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