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发明名称
Method of manufacturing semiconductor devices
摘要
申请公布号
GB1124202(A)
申请公布日期
1968.08.21
申请号
GB19660027787
申请日期
1966.06.21
申请人
ION PHYSICS CORPORATION
发明人
分类号
H01J37/317;H01L21/00;H01L21/265
主分类号
H01J37/317
代理机构
代理人
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地址
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