发明名称 CHIP MOUNTING APPARATUS AND METHOD
摘要 <p>PROBLEM TO BE SOLVED: To provide a chip mounting apparatus and method enabling the position detection of a display panel and chip with high accuracy by a high magnification camera and bonding the chip to electrodes on a transparent plate at high speed. SOLUTION: A table 14 is disposed in front of a display panel 1 on a movable table and light refracting element 15 is mounted on the table 14. A chip 5 is positioned on the table 14 and a first mark M1 on the panel 1 and second mark N2 on the chip 5 are observed by a lower camera 10 focused on the mark M1. The mark 2 located at a higher position than the mark M1 is observed without being out of focus, since the element 15 is located below this position. From the observation result, an outer lead 6a is positioned relative to an electrode and bonded to it.</p>
申请公布号 JPH0945728(A) 申请公布日期 1997.02.14
申请号 JP19950193061 申请日期 1995.07.28
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 ONIZUKA YASUTO
分类号 H01L21/60;G09F9/00;H01L21/68;H01L23/50;(IPC1-7):H01L21/60 主分类号 H01L21/60
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