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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0943050(A)
申请公布日期
1997.02.14
申请号
JP19950190915
申请日期
1995.07.26
申请人
MATSUSHITA ELECTRIC WORKS LTD
发明人
KITAYAMA KAZUYA;AIZAWA KOICHI
分类号
G01J1/02;H01L29/84;(IPC1-7):G01J1/02
主分类号
G01J1/02
代理机构
代理人
主权项
地址
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