INSPECTION SPECIMEN FOR SCANNING PROXIMITY FIELD OPTICAL MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a scanning proximity field optical microscope so capable of previously inspecting the performance of an SNOM unit as to sufficiently accurately interpret SNOM measuring information without influence of AFM measuring information. SOLUTION: The inspection specimen 46 comprises a plurality of sample constituting units being partly optically transparent and having different refractive indexes from each other and substantially flat surfaces in such a manner that an optical difference generating part patterned in a predetermined shape and capable of setting arbitrary refractive index is provided at the part of the plurality of sample constituting members. The plurality of sample constituting members each is formed of a board member 48 made of Pyrex glass and an optical member 50 made of silicon oxide connected onto the board member in such a manner that the optical difference generating part is provided in the optical member. The generating part has a plurality of air gaps 52a, 52b, 52c extended in parallel with each other at a predetermined interval and each capable of being set to an arbitrary refractive index.