| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a glass-substrate conveyance apparatus by which a glass substrate can be conveyed smoothly without damaging the glass substrate by a method wherein string-shaped elastic members which support four corners of the glass substrate are arranged and installed at a tray plate and a link mechanism which extends and contacts an arm in which the tray plate has been attached at the tip is provided. SOLUTION: A glass-substrate conveyance apparatus is provided with an H-shaped tray plate 1 provided with four string-shaped elastic members 2 which are arranged and installed along short sides of respective four corners in a prescribed length and which have circularly swelling faces 2a used to support a glass substrate 21. The tip part of an arm 3 is attached to the central part of the tray plate 1 so as to be freely rotatable, and the arm is arranged and installed at a pressure regulating chamber 16. A link mechanism 4 is moved while the direction of the tray plate 1 is being kept in the directions indicated by arrows A, B, and the arm 3 is operated in such a way that the glass substrate 21 is taken into/from a cassette 11 or a plasma etching chamber 15 from/into the pressure regulating chamber 16. A motor 5 which is arranged and installed at the outside of the pressure regulating chamber 16 drives the link mechanism 4.</p> |
