ALIGNING METHOD AND ALIGNING DEVICE FOR OPPOSITE PLATE

摘要

PROBLEM TO BE SOLVED: To improve the alignment accuracy of opposite plates. SOLUTION: An upper mask plate 48 and a lower mask plate 52 are supported via respective plate attraction frames to an upper mask plate supporting base and a lower mask plate supporting base, by which both mask plates are disposed opposite to each other. Both mask plates are first brought near to each other at the time of aligning these upper and lower mask plates. A mask plate enclosing region H enclosing these mask plates is formed by a sealing body 55 around the mask plates to airtightly hold the mask plates. On the other hand, the air in the mask plate enclosing region H is sucked through a suction hole 5 from before the mask plate enclosing region H is held airtight. The upper and lower mask plates are joined while the generation of the negative pressure in the mask plate enclosing region H is progressed if the movement of the plates near to each other and the suction are executed until both mask plates are joined and, therefore, air pockets do not remain between both mask plates.