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发明名称
Semiconductor matrix type sensor for very small surface pressure distribution
摘要
申请公布号
EP0566336(B1)
申请公布日期
1997.02.12
申请号
EP19930302814
申请日期
1993.04.08
申请人
ENIX CORPORATION
发明人
TAMORI, TERUHIKO
分类号
G01B7/28;G01L5/00;G06F3/033;G06F3/045;G06K9/00;G11C8/04;H01L29/84;H03K17/00;(IPC1-7):G01L1/22;G06K11/12;A61B5/103
主分类号
G01B7/28
代理机构
代理人
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地址
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