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发明名称
摘要
申请公布号
JP2581494(B2)
申请公布日期
1997.02.12
申请号
JP19920275864
申请日期
1992.10.14
申请人
APPLIED MATERIALS INC
发明人
JOERU EMU KUTSUKU;JON AARU TORO
分类号
H01L21/302;H01J37/32;H01L21/3065;H05H1/46;(IPC1-7):H01L21/306
主分类号
H01L21/302
代理机构
代理人
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地址
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