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发明名称
SEMICONDUCTOR WAFER PROCESSING SYSTEM
摘要
申请公布号
EP0757842(A1)
申请公布日期
1997.02.12
申请号
EP19940922515
申请日期
1994.07.15
申请人
SEMITOOL, INC.
发明人
THOMPSON, RAYMON, F.;BERNER, ROBERT, W.;CURTIS, GARY, L.;CULLITON, STEPHEN, P.;WRIGHT, BLAINE, G.
分类号
B65G49/07;H01L21/00;H01L21/673;H01L21/677;(IPC1-7):H01L21/00
主分类号
B65G49/07
代理机构
代理人
主权项
地址
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