发明名称 |
Low surface energy passivation layer for micromechanical devices |
摘要 |
It is possible to use an oriented monolayer to limit the Van der Waals forces between two elements by passivation. An oriented monolayer (34) is formed on a surface of a micromechanical device. When the surface comes in contact with another surface, the oriented monolayer decreases the Van der Waals forces to reduce the attraction between the surfaces.
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申请公布号 |
US5602671(A) |
申请公布日期 |
1997.02.11 |
申请号 |
US19940193689 |
申请日期 |
1994.02.04 |
申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
HORNBECK, LARRY J. |
分类号 |
B81B3/00;G02B26/08;(IPC1-7):G02B26/08;G02B26/02 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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