| 发明名称 |
Selected O-quinonediazide sulfonic acid esters of phenolic compounds and their use in radiation-sensitive compositions |
| 摘要 |
A photosensitive compound comprising at least one o-quinonediazide sulfonic acid ester of a phenolic compound, said esters selected from the group consisting of formulae (IB) and (IIB): <IMAGE> (IB) <IMAGE> (IIB) wherein the variables are as defined in the description.
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| 申请公布号 |
US5602260(A) |
申请公布日期 |
1997.02.11 |
| 申请号 |
US19950451939 |
申请日期 |
1995.05.26 |
| 申请人 |
OCG MICROELECTRONIC MATERIALS, INC. |
发明人 |
BLAKENEY, ANDREW J.;MEDINA, ARTURO N.;TOUKHY, MEDHAT A.;FERREIRA, LAWRENCE;TADROS, SOBHY |
| 分类号 |
G03F7/039;C07C39/15;C07C39/17;C07C43/23;C07C47/575;C07C309/76;C07D307/80;C07D317/54;C07D319/18;C08G8/00;C08G8/10;G03F7/022;(IPC1-7):C07D407/10 |
主分类号 |
G03F7/039 |
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