发明名称 Non-corrosive photoresist stripper composition
摘要 A non-corrosive positive photoresist stripper composition comprising: (a) a solvent selected from N-methyl-2-pyrrolidone, N-hydroxyethyl-2-pyrrolidone, 1,3-dimethyl-2-imidazolidinone dimethylsulfoxide, and admixtures thereof; (b) a corrosion inhibitor selected form tricine, bicine, (2-benzothiozolythio)succinic acid, and admixtures thereof; (c) optionally, an alkanolamine selected from diethyleneglycolamine, monoethanolamine, diethanolamine, triethanolamine, and admixtures thereof; (d) optionally, water; and (e) optionally, a water-soluble surface active compound.
申请公布号 AU6340296(A) 申请公布日期 1997.02.10
申请号 AU19960063402 申请日期 1996.06.24
申请人 OLIN MICROELECTRONIC CHEMICALS, INC. 发明人 KENJI HONDA;DONALD F. PERRY;TAI-SHIH MAW
分类号 C11D7/32;G03F7/42 主分类号 C11D7/32
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