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经营范围
发明名称
SUBSTRATE HEATER
摘要
申请公布号
JPH0941139(A)
申请公布日期
1997.02.10
申请号
JP19950212845
申请日期
1995.07.28
申请人
ULVAC JAPAN LTD
发明人
ODAGI HIDEYUKI
分类号
C23C14/50;C23C16/02;H01L21/205;(IPC1-7):C23C14/50
主分类号
C23C14/50
代理机构
代理人
主权项
地址
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