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发明名称
METHOD FOR GRINDING BACK SURFACE OF WAFER
摘要
申请公布号
JPH0938852(A)
申请公布日期
1997.02.10
申请号
JP19950214201
申请日期
1995.07.31
申请人
SONY CORP
发明人
UCHIZONO NARIFUMI;NAKAMURA KAZUHIRO
分类号
B24B7/22;H01L21/304;(IPC1-7):B24B7/22
主分类号
B24B7/22
代理机构
代理人
主权项
地址
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