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发明名称
REFORMING METHOD OF METAL SURFACE WITH GAS CLUSTER ION BEAM
摘要
申请公布号
JPH0941122(A)
申请公布日期
1997.02.10
申请号
JP19950195516
申请日期
1995.07.31
申请人
RES DEV CORP OF JAPAN
发明人
YAMADA AKIRA;MATSUO JIRO
分类号
C23C8/36;C23C14/48;(IPC1-7):C23C8/36
主分类号
C23C8/36
代理机构
代理人
主权项
地址
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