| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a ceramic heater causing less warp due to differences of the structure and physical properties and also at a low production cost by constituting a support base material, an insulation layer and a heating layer of specific materials. SOLUTION: This ceramic heater is provided with a first insulation layer 2 consisting of pyrolytic boron nitride on the surface of the supporting base material 1 consisting of a carbon/carbon composite material and a heating layer 3 consisting of pyrolitic graphite on one surface of this first insulation layer 2. A second insulation layer 4 consisting of pyrolytic boron nitride is preferably formed on the heating layer 3, in order to prevent the heating layer 3 from being electrically short-circuited. Also when an electrode layer 5 consisting of pyrolytic graphite is formed on the other surface of the first insulation layer 2 and a dielectric layer 6 consisting of pyrolytic boron nitride is furthermore formed on it, and a static attraction part 7 having a static attraction function is formed, the adhesive strength of wafer can be favorably enhanced.</p> |
