发明名称 FORMATION OF PATTERN
摘要 PROBLEM TO BE SOLVED: To achieve fine machining of, for example, a lead frame by forming a photoresist film on a plated film which is formed by covering an insoluble metal on a substrate for an etching liquid and forming a plated film pattern using a photoresist pattern. SOLUTION: Silver which is insoluble and can be plated to an etching liquid should be used for the plating operation of the substrate of a lead frame. Plating should be electrically deposited for a solution where a plating material is dissolved. After forming a plating film 32 on both upper and lower surfaces of a substrate 31 and forming a photoresist film 33 on it again, a mask is covered before exposure and development, thus forming a photoresist pattern. A plated film pattern using a photoresist pattern is formed by applying a current in opposite direction from plating, thus forming a plated film pattern 32A with the same pattern as a photoresist pattern 33A.
申请公布号 JPH0936084(A) 申请公布日期 1997.02.07
申请号 JP19960185861 申请日期 1996.07.16
申请人 SANSEI KOKU SANGYO KK 发明人 RI SOUKIN
分类号 C23F1/00;G03F7/00;H01L21/304;H01L21/306;H01L23/50;H05K3/06;H05K3/07;H05K3/44;(IPC1-7):H01L21/306 主分类号 C23F1/00
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