| 摘要 |
PROBLEM TO BE SOLVED: To significantly reduce the manhour of manufacture with a simple structure to facilitate the downsizing, and obtain a higher performance without deteriorating the performance by the downsizing. SOLUTION: A lid body 12 having a thin diaphragm part 12a in the center part and a thick fixed part 12b in the peripheral part and a lid body 13 having the same structure are arranged opposite to each other on both end parts of a cylindrical frame body 11 with the fixed parts 12b, 13b being in close contact with each other, fixed electrodes 18, 20 are formed on the inner surfaces of the fixed parts 12b, 13b of the lid body 12 and the lid body 13, respectively, a strut 15 is connected between the opposed surfaces of the diaphragm parts 12a, 13a, an electrode support plate 16 opposed to the fixed electrodes 18, 20 with a clearance part is supported and fixed by a strut 15 between the lid body 12 and the lid body 13, and movable electrodes 17, 19 are formed on the surface opposed to the fixed electrodes 18, 20 with the clearance part of the electrode support part 16.
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