| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a stage mechanism having two guide beams provided with accurate two-dimensional movement and yawing adjustment for accurate positioning which are used in a precision machine. SOLUTION: This stage has a first guide 34 arranged on a supporting platen 30 having a flat surface and extending in Y-direction and a second guide 32 extending in X-direction, and is provided with a first guide member 42 having first fluid bearings 74a and 74b arranged on one end and moving along the guide 34, a second guide member 40 having a second fluid bearing whose constraint is weaker than that of the first bearing arranged on the other end and moving along the guide 32, and a table 50 guided by the first guide member through a third fluid bearing and guided by the second guide member through a fourth fluid bearing whose constraint is stronger than that of the third fluid bearing. By this constitution, the constraint can be reduced to the minimum, enough constraint can be given through the bearing without excessively constraining a movable constituting component by using preload, so that that maximum error can be reduced and requirement on manufacturing tolerance can be reduced.</p> |
