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发明名称
ION SOURCE
摘要
申请公布号
JPH0935648(A)
申请公布日期
1997.02.07
申请号
JP19950207634
申请日期
1995.07.21
申请人
NISSIN ELECTRIC CO LTD
发明人
NAITO KATSUO
分类号
H01J27/02;H01J37/08;(IPC1-7):H01J27/02
主分类号
H01J27/02
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代理人
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