METHOD OF FORMING PATTERN,申请号JP19950182339-传众专利搜索

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发明名称	METHOD OF FORMING PATTERN
摘要
申请公布号	JPH0936011(A)	申请公布日期	1997.02.07
申请号	JP19950182339	申请日期	1995.07.19
申请人	HITACHI LTD	发明人	ONOZUKA TOSHIHIKO
分类号	H01L21/027;(IPC1-7):H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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