| 摘要 |
PROBLEM TO BE SOLVED: To obtain a semiconductor radiation detecting element applicable to a line sensor or a plane sensor where the radiation detecting elements are arranged compactly while preventing intrusion of impurities into a crystal. SOLUTION: A plurality of individual electrodes 3, each having a common electrode 2 formed on one side and solder bumps 4 formed on the other side to be connected with a printed board, are formed on a compound semiconductor 1. An insulating protective film 6 of SiNx is then deposited by ECR plasma CVD on the end face 5 of the compound semiconductor 1 in order to prevent intrusion of impurities in flux, e.g. Sn or Pb composing the solder, into the crystal at the time of thermally fusing the solder bump.
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