发明名称 PRODUCTION MANAGEMENT METHOD AND APPARATUS
摘要 <p>PROBLEM TO BE SOLVED: To provide production management method and apparatus which inexpensively and effectively make the most of space in a production line and realize first-in first-out control of products to be processed. SOLUTION: The apparatus comprises a feed speed manager for managing a production progress degree of a semiconductor wafer 1, a personal computer 3 connected to the progress degree manager for displaying thereon production progress degree information stored in the progress degree manager, a storage shelf 6 having an accommodation case 4 having the semiconductor wafer 1 housed therein and having a sequencer 5 connected to the personal computer 3, and a bar code reader 8 for inputting a lot number 7 of the semiconductor wafer 1 to the personal computer 3. Installed in the storage shelf 6 are a sensor 9 for detecting presence or absence of the accommodation case 4 and a display LED 10 indicative of detection information of the sensor 9, so that the sequencer 5 controls the sensor 9 and display LED 10 to thereby control input and output of the accommodation case 4.</p>
申请公布号 JPH0936197(A) 申请公布日期 1997.02.07
申请号 JP19950182333 申请日期 1995.07.19
申请人 HITACHI LTD;HITACHI HOKKAI SEMICONDUCTOR LTD 发明人 SHIODA KAZUHIRO
分类号 B23Q41/00;B65G1/137;B65G61/00;G05B15/02;G05B19/418;H01L21/02;H01L21/677;H01L21/68;(IPC1-7):H01L21/68 主分类号 B23Q41/00
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