| 发明名称 |
MANUFACTURE OF SPIN DRYING DEVICE, WASHING DEVICE WITH SPIN DRYING DEVICE, ETCHING DEVICE WITH WASHING DEVICE, AND SEMICONDUCTOR DEVICE |
| 摘要 |
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| 申请公布号 |
JPH0936081(A) |
申请公布日期 |
1997.02.07 |
| 申请号 |
JP19950183738 |
申请日期 |
1995.07.20 |
| 申请人 |
MATSUSHITA ELECTRIC IND CO LTD |
发明人 |
KUWATA JUN;SAITO HIROKI;MANSEI ATSUSHI;HAKODA SHUZO;KONISHI HIDEAKI |
| 分类号 |
H01L21/28;H01L21/302;H01L21/304;H01L21/3065;H01L21/336;H01L21/461;H01L29/786;(IPC1-7):H01L21/304;H01L21/306 |
主分类号 |
H01L21/28 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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