| 摘要 |
PROBLEM TO BE SOLVED: To detect the position of a work piece with high accuracy by detecting the position information on the work out of the images which are photographed by the image pickup devices having the limited resolution. SOLUTION: A part (view field 30 of CCD camera) showing the features of the shape of a work and other parts (view field 31 of CCD camera) of the work are photographed by two CCD cameras which are fixed on the ground. The position relations are previously measured (X0, Y0) among two CCD cameras, a scale 7 and the standard marks 25 and 26 put on the scale 7. A corner C1 is set (X1, Y1) on the basis of the mark 25, and a corner C2 is set (X2, Y2) on the basis of the mark 26 respectively. Then the final target position of the corner C1 is set (X10, Y10). The position (X1, Y1) of the work and the tilt angleθof a chip set against an axis X are detected based on the position data which are previously measured and also the data on two images which are photographed by both CCD cameras.
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