| 摘要 |
PROBLEM TO BE SOLVED: To arrange even a less experienced process designer to keep calculation accuracy within a guaranteed range by sampling a processing process which affects an object simulation from input process data and preparing input data and thereby executing impurity simulation. SOLUTION: A sampling means 9, which is connected to a process data memory 12, samples a processing process, which affects an object simulation, from process data. An input data preparation means 10 prepares input data, which is used for the object simulation, from the sampled processing process and a process data memory 12. An input data memory 13 outputs the stored input data to an impurity simulator 6. The impurity simulator 6 simulates an impurity concentration distribution in a substrate. |
