| 摘要 |
PROBLEM TO BE SOLVED: To reduce the damage due to ultraviolet rays of an illuminometer for controlling a lamp by positioning the ultraviolet ray illuminometer within a region where ultraviolet rays arrive in a substrate box when measuring illuminance and retreating the ultraviolet ray illuminometer outside the region where ultraviolet rays arrive when no illuminometer is used. SOLUTION: An ultraviolet ray illuminometer elevating mechanism 21 is driven when starting the treatment of a substrate and an ultraviolet ray illuminometer 15 is raised to position itself in a region where ultraviolet rays arrive. Then, when a certain amount of time passes, an illuminance detection part 16 calculates the putting-out timing of a dielectric barrier discharge lamp 9 to apply a specific amount of ultraviolet rays to a substrate 3 and gives the result to a control part 17. When the illuminance changes, the putting-out timing of the lamp 9 is obtained, based on the illuminance change and the signal is given to the control part 17. An illuminometer measurement timing control device 22 drives the ultraviolet ray illuminometer elevating mechanism 21 accordingly and lowers the ultraviolet ray illuminometer 15, thus retracting it to the lower side from the lower edge of the region where ultraviolet rays arrive. |
