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发明名称
Werkzeugauswechselsystem für Hybrid-Chipverbinder
摘要
申请公布号
DE69120111(T2)
申请公布日期
1997.02.06
申请号
DE1991620111T
申请日期
1991.03.04
申请人
F & K DELVOTEC BONDTECHNIK GMBH, 82041 OBERHACHING, DE
发明人
SCHWEITZER, KARL, A-6300 ANGERBERG, AT;ZEINDL, GERHARD, A-6232 MUNSTER 377, AT
分类号
B23Q3/155;H01L21/00;H01L21/52;H01L21/677;(IPC1-7):H05K13/00
主分类号
B23Q3/155
代理机构
代理人
主权项
地址
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