An unbalanced magnetron sputter ion plating system (10) has a first magnetron (16) with a first target (18) of metal sulphide (e.g. MoS2) and a second magnetron (20) with a second target (22) of metal (e.g. Titanium). In order to recover water and sulphur impurities from the surfaces of the coating chamber the metal target is energised in a pre-coating ion cleaning operation. Metal atoms getter the impurities and allow for better coatings, especially low friction MoS2 coatings. Apparatus for achieving multi-layer coatings is disclosed. The coatings have low friction, good adhesion, and high hardness.
申请公布号
WO9704142(A1)
申请公布日期
1997.02.06
申请号
WO1996GB01718
申请日期
1996.07.18
申请人
TEER COATINGS LIMITED;TEER, DENNIS, GERALD;BELLIDO-GONZALEZ, VICTOR;HAMPSHIRE, JOANNE, HELEN
发明人
TEER, DENNIS, GERALD;BELLIDO-GONZALEZ, VICTOR;HAMPSHIRE, JOANNE, HELEN