| 申请人 |
MITSUBISHI MATERIALS CORP., TOKIO/TOKYO, JP;MITSUBISHI MATERIAL QUARTZ CORP., AKITA, JP |
发明人 |
ARAI, YOSHIAKI, C/O CHUO-KENKYUSHO, MITSUBISHI, OMIYA-SHI, SAITAMA-KEN, JP;KIDA, MICHIO, C/O CHUO-KENKYUSHO, MITSUBISHI, OMIYA-SHI, SAITAMA-KEN, JP;ONO, NAOKI, C/O CHUO-KENKYUSHO, MITSUBISHI, OMIYA-SHI, SAITAMA-KEN, JP;SAHIRA, KENSHO, C/O CHUO-KENKYUSHO, MITSUBISHI, OMIYA-SHI, SAITAMA-KEN, JP;TAKESHITA, MOTOMI, C/O MITSUBISHI MATERIALS, AKITA-SHI, AKITA-KEN, JP;SUGIURA, KENGO, C/O MITSUBISHI MATERIALS, AKITA-SHI, AKITA-KEN, JP |
