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发明名称
Verfahren zum Auftragen einer Dünnschicht auf ein Substrat durch Sputtern
摘要
申请公布号
DE69123802(D1)
申请公布日期
1997.02.06
申请号
DE19916023802
申请日期
1991.09.19
申请人
FUJITSU LTD., KAWASAKI, KANAGAWA, JP
发明人
INOUE, MINORU, C/O FUJITSU LIMITED, KAWASAKI-SHI, KANAGAWA 211, JP
分类号
C23C14/34;H01J37/34;H01L21/203;H01L21/285;H01L21/31;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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