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发明名称
摘要
申请公布号
JP2579517(B2)
申请公布日期
1997.02.05
申请号
JP19880042115
申请日期
1988.02.26
申请人
FUJITSU LTD
发明人
KOBAYASHI NAOKI
分类号
H01L27/04;G05F3/24;H01L21/822;H03K19/00;H03K19/086;(IPC1-7):H03K19/00
主分类号
H01L27/04
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代理人
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