发明名称 Etching electrode and manufacturing process thereof
摘要 An inexpensive etching electrode having a much longer service life than glass type carbon is provided. An etching electrode made from high hardness carbon comprising a highly dense crystallized structure with an apparent density of 1.7 times or more.
申请公布号 EP0757374(A1) 申请公布日期 1997.02.05
申请号 EP19960301074 申请日期 1996.02.16
申请人 KABUSHIKI KAISHA KOBE SEIKO SHO ALSO KNOWN AS KOBE STEEL LTD. 发明人 NOZAWA, TOSHIHISA;KITAMURA, TOSHIAKI;KAWAI, AKIHIRO;NISHIZAWA, TAKASHI;MURAMATSU, KAZUO;SUZUKI, TETSUO;TAKADA, SHUNSUKE
分类号 H05H1/34;C01B31/02;C04B35/52;C23F4/00;H01J37/32;H01L21/302;H01L21/3065 主分类号 H05H1/34
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