发明名称 Method using cadmium-rich CdTe for lowering the metal vacancy concentrations of HgCdTe surfaces
摘要 A hybrid focal plane array has p-n junction photodiodes formed in a substrate (10) of HgCdTe which is passivated by a cap layer (12) of Cd-rich CdTe. The active surface of the HgCdTe substrate is passivated by annealing at a temperature sufficient to support interdiffusion between the Cd-rich CdTe capping layer (12) and the HgCdTe substrate (10). Use of the CdTe capping layer (12) with a slight excess Cd maintains the surface of the HgCdTe substrate (10) in a metal-rich phase condition.
申请公布号 US5599733(A) 申请公布日期 1997.02.04
申请号 US19940342530 申请日期 1994.11.21
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 WAN, CHANG-FENG;TREGILGAS, JOHN H.
分类号 H01L21/469;H01L31/103;(IPC1-7):H01L21/225 主分类号 H01L21/469
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