发明名称 AIR CYLINDER AND CONVEYANCE DEVICE AND SEMICONDUCTOR MANUFACTURING DEVICE THEREWITH
摘要 PROBLEM TO BE SOLVED: To provide reduction in failure percentage and cost and simplified maintenance by conducting speed control of an air cylinder mechanically for a simplified mechanism. SOLUTION: On the first piping on both sides of a cylinder 4, or driving air piping, speed controllers 10, 15 for regulating the speed of a piston 5 by regulating air flow rate, air-operated valves 11, 16 opened and closed by an air pressure change, and check valves 9, 14 which permit air to pass only in the direction of the cylinder 4 are installed. In the case of moving the piston 5 to the left in the drawing, when air is first supplied to a selector valve 7, whose air introduction port is S2, air passes through the check valve 9 and the speed controller 10, is introduced to the right by the piston 5 of the cylinder 4, and the piston 5 moves to the left side by air pressure. The piston 5 moves while decelerating, and reaches one end of the cylinder 4.
申请公布号 JPH0932803(A) 申请公布日期 1997.02.04
申请号 JP19950183828 申请日期 1995.07.20
申请人 HITACHI LTD;HITACHI HOKKAI SEMICONDUCTOR LTD 发明人 MIYAGI EISUKE
分类号 B65G25/04;F15B11/06;H01L21/50;H01L21/677;H01L21/68;(IPC1-7):F15B11/06 主分类号 B65G25/04
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