Controlled-immersion inspection

摘要

A controlled-immersion inspection mechanism gradually immerses a planar pattern of integrated circuits or other articles into a tank filled with water to a given level; across the tank there are two spaced parallel guide tracks along which two carriages, connected by a platform, move from an entry position above the water to an inspection position. In the inspection position the platform supports the articles, in an orderly array, for scanning inspection by a focussed energy beam, preferably an ultrasonic beam. A platform drive drives the platform between its entry and inspection positions. A mesh or other removable cover that permits water to flow but stabilizes article positions may cover the articles during immersion; the mesh is usually removed before scanning.