Microminiature combustible gas sensor and method of fabricating a microminiature combustible gas sensor

摘要

A microminiature combustible gas sensor and a method of fabricating a microminiature combustible gas sensor are provided in which the catalytically active detector comprises a high surface area refractory catalyst support. A microminiature combustible gas sensor is also provided which comprises a catalytically active detector and a diffusion/flow restrictor for limiting the amount of combustion fuel reaching the catalytically active detector. The restrictor causes the catalytic reaction occurring in the vicinity of the catalytically active detector element to become substantially diffusion limited and reduces the power requirements of the sensor. The restrictor also reduces convective heat losses which may arise because of the large temperature gradient surrounding the catalytically active detector element. Finally, a microminiature combustible gas sensor comprising a flashback arrestor with one or more generally linear capillaries for preventing flashback is provided.