发明名称 |
Suspended single crystal silicon structures and method of making same |
摘要 |
Temperature-sensitive transducers and other circuitry are manufactured by an electrochemical post-processing etch on an integrated circuit fabricated using a conventional CMOS process. Tetramethyl ammonium hydroxide or another anisotropic etchant having similar characterisics is used to selectively etch exposed front-side regions of a p-type silicon substrate, leaving n-type wells suspended from oxide beams. Circuits in the n-wells are thermally and electrically insulated from the substrate.
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申请公布号 |
US5600174(A) |
申请公布日期 |
1997.02.04 |
申请号 |
US19940321299 |
申请日期 |
1994.10.11 |
申请人 |
THE BOARD OF TRUSTEES OF THE LEELAND STANFORD JUNIOR UNIVERSITY |
发明人 |
REAY, RICHARD J.;KLAASSEN, ERNO H. |
分类号 |
G01F1/684;G01K7/01;H01L29/10;(IPC1-7):H01L31/058;H01L29/06 |
主分类号 |
G01F1/684 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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